Simulation of experiments with partially coherent x-rays using Synchrotron Radiation Workshop

O. Chubar, M. Rakitin, Y.C. Chen-Wiegart, A. Fluerasu and L. Wiegart
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Abstract: High-accuracy physical optics calculation methods used in the “Synchrotron Radiation Workshop” (SRW) allow for multiple applications of this code in different areas, covering development, commissioning, diagnostics and operation of X-ray instruments at light source facilities. This presentation focuses on the application of the SRW code for the simulation of experiments at these facilities. The most complete and most detailed simulation of experiments with SRW is possible in the area of elastic coherent scattering, where the interaction of radiation with samples can be described with the same transmission-type “propagators” that are used for the simulation of fully- and partially-coherent radiation propagation through X-ray optical elements of beamlines. A complete “source-to-detector” simulation of such an experiment for a lithographic sample is described here together with comparisons of the simulated coherent scattering data with actual measurements results, obtained at the Coherent Hard X-ray (CHX) beamline of the National Synchrotron Light Source II (NSLS-II). Particular attention is paid to the analysis of visibility of speckles and intensity levels in the scattered radiation patterns at different degrees of coherence of the radiation entering the sample.